KLA-Tencor and Tokyo Electron introduce new software tool to measure 3D logic and memory structures

Press release, May 13; Jessie Shen, DIGITIMES Asia Wednesday 13 May 2009 0

KLA-Tencor today (May 13) launched the AcuShape 3D software modeling tool, developed with Tokyo Electron, to meet optical dimension metrology requirements for the 32nm node and below.

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