KLA-Tencor has announced two new wafer inspection systems and a new electron-beam (e-beam) review system to address defect issues at the 3Xnm / 2Xnm nodes...
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KLA-Tencor has announced two new wafer inspection systems and a new electron-beam (e-beam) review system to address defect issues at the 3Xnm / 2Xnm nodes...