CONNECT WITH US

Chinese researchers develop solid-state 193nm DUV laser targeting advanced chipmaking

Chia-Han Lee, Taipei; Levi Li, DIGITIMES Asia 0

Credit: AFP

Researchers at the Chinese Academy of Sciences (CAS) have developed a solid-state deep ultraviolet (DUV) laser that emits 193nm light in lab conditions—a wavelength critical for semiconductor lithography. Although still in the early research phase...

The article requires paid subscription. Subscribe Now