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Applied Materials targets 300mm RTP with new, dedicated platform

Press release; Stephen Taylor, DIGITIMES Asia Tuesday 17 September 2002 0

Applied Materials has introduced its new Radiance Vantage system, a dedicated, two-chamber rapid thermal processing (RTP) solution for 300mm high-volume chip manufacturing. Exhibited for the first time at SEMICON Taiwan 2002, Vantage combines world-class...

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