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TSMC adopts Jordan Valley JVX 6200 for copper layer metrology

Press release; Jessie Shen, DIGITIMES Asia Thursday 16 April 2009 0

Jordan Valley Semiconductors, a provider of semiconductor metrology solutions, recently announced that Taiwan Semiconductor Manufacturing Company (TSMC) has selected its JVX 6200 X-ray metrology tool for measuring the thickness of thin-film copper la...

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