Cymer ships laser-produced plasma EUV lithography source to ASML

Press release; Jessie Shen, DIGITIMES Asia Tuesday 14 July 2009 0

Cymer, which specializes in excimer laser illumination sources for deep ultraviolet (DUV) photolithography systems, has kicked off shipments of what it claims is the world's first fully-integrated laser-produced (LPP) plasma EUV lithography source to...

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