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Rexchip reportedly orders EUV lithography tool from ASML

Josephine Lien, Taipei; Jessie Shen, DIGITIMES Asia Tuesday 7 December 2010 1

ASML has recently invited DRAM companies to make early reservations for extreme ultraviolet (EUV) lithography tools to avoid a repeat of early 2010, when immersion scanners saw constrained supply due to a sudden upsurge in demand, according to industry...

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