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Home Tech Semiconductors

KLA-Tencor targets 10nm and below with new reticle inspection systems

Press release

Aug 18, 2016, 09:55 0

KLA-Tencor has introduced three advanced reticle inspection systems that address 10nm and below mask technologies: the Teron 640, Teron SL655 and Reticle Decision Center (RDC)...

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