IBM, Lam Research join forces on sub-1nm logic and High-NA EUV development

Levi Li

, DIGITIMES Asia, Taipei

Mar 12, 2026, 12:17 0

Mukesh Khare, IBM Semiconductors GM (left), and Vahid Vahedi, Lam Research chief technology and sustainability officer. Credit: IBM

IBM and Lam Research have announced a five-year collaboration to develop materials, manufacturing processes, and High-NA EUV lithography technologies for sub-1nm logic scaling. The agreement expands a long-standing partnership aimed at establishing viable...

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