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NEWS TAGGED EUV
Friday 20 July 2012
TSMC says still considering ASML proposal
Taiwan Semiconductor Manufacturing Company (TSMC) is still evaluating the proposal from ASML for joint development of new technologies, and no decision has been made yet, according...
Friday 2 March 2012
ASML updates EUV progress
ASML has been developing the next generation of its NXE-series EUV lithography machines, the 3300 series, according to Peter Jenkins, VP of marketing at the Dutch fab tool supplier...
Tuesday 11 October 2011
New ASML-IMEC deal demos move to EUV lithography
IMEC has announced that it has signed a new agreement with ASML for a period of five years (2011-2015). The pair's continued collaboration guarantees the global semiconductor ecosystem...
Tuesday 20 September 2011
Applied Materials clears critical roadblock to EUV lithography with new photomask etch system
Applied Materials, Inc. advanced the state-of-the art in photomask technology with its new Applied Centura Tetra EUV Advanced Reticle Etch system. Overcoming a major hurdle to the...
Friday 9 September 2011
450mm and EUV linked with uncertainty, says SEMI
The transition to manufacturing semiconductors on larger wafers continues to be one of the hottest topics in the industry. However, uncertainty with EUV rollout has exacerbated the...
Monday 16 May 2011
ASML to ship 10 EUV tools in 2012
ASML has received 10 orders for its next-generation ultraviolet (EUV) lithography system – the NXE:3300 – with deliveries starting in 2012, according to the Dutch fab...
Monday 27 December 2010
Commentary: Financially-strapped Taiwan DRAM makers have difficulties migrating to sub-20nm processes
Taiwan-based DRAM makers will find themselves at a disadvantage to migrate their production to 20nm and below processes, as they struggle to preserve cash for the expenses needed...
Tuesday 7 December 2010
Rexchip reportedly orders EUV lithography tool from ASML
ASML has recently invited DRAM companies to make early reservations for extreme ultraviolet (EUV) lithography tools to avoid a repeat of early 2010, when immersion scanners saw constrained...
Thursday 21 October 2010
EUV to get ready for high-volume production in 2014, says IMEC chief
Extreme ultraviolet (EUV) lithography is likely to reach mass production in 2014 at the earliest, according to Luc Van den hove, president and CEO of Belgian researcher IMEC. But...
Friday 25 June 2010
TSMC to take delivery of EUV lithography system in 2011, says R&D head
Taiwan Semiconductor Manufacturing Company (TSMC) will take delivery of its first extreme ultraviolet (EUV) lithography system from ASML in 2011 paving the way for the company to...
Monday 22 February 2010
TSMC to take delivery of ASML EUV lithography system
ASML Holding today announced that Taiwan Semiconductor Manufacturing Company (TSMC) will take delivery of a Twinscan NXE:3100 extreme ultra-violet (EUV) lithography system. This tool...
Tuesday 17 November 2009
Toshiba develops photoresist for 20nm EUV lithography
Toshiba has announced development of a high-resolution photo-sensitive film (photoresist) essential for future application of extreme ultraviolet (EUV) lithography in semiconductor...
Monday 12 October 2009
ASML upbeat on micro-lithography growth
Customers have turned more active in placing orders, according to Antonio Mesquida Kusters, Director of Market Intelligence for ASML. Citing predictions by research firms, Kusters...
Wednesday 30 September 2009
UMC focusing R&D on 28nm, 22nm processes
United Microelectronics Corporation (UMC) currently focuses its R&D on 28nm and 22nm processes and related key technologies as well as 18-inch wafers, according to company central...
Tuesday 15 September 2009
KLA-Tencor extends reticle inspection systems to 2Xnm
KLA-Tencor has introduced the Teron 600-series reticle defect inspection system to address a major transition in mask design at the 2Xnm logic (3Xnm half-pitch memory) node. The new...