ProMOS: 12-inch wafer equipment from ASML, Applied Materials

Janet Wang, Hsinchu; Noah Sauve, DIGITIMES Asia Tuesday 9 October 2001 0

Breaking away from the exclusive use of Canon and Ebara’s respective micro-lithography and copper-process CMP (chemical mechanical polishing) equipment, ProMOS Technologies has purchased equipment from ASML and Applied Materials for its new 12-inch...

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