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EV Group develops mask aligner with LED light source

Press release, July 11; Michael McManus, DIGITIMES Asia Tuesday 11 July 2006 0

EV Group (EVG), a supplier of wafer-bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, on July 11 announced the availability of what it claims is the industry's first LED (Light Emitting Diode) light source for...

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