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Novellus confident about PECVD market

Claire Sung, Taipei; Esther Lam, DIGITIMES Asia Tuesday 3 April 2007 0

Having landed orders from the top-two foundries for its plasma enhanced chemical vapor deposition (PECVD) systems on 65nm wafer production, Novellus Systems is confident that its systems are capable of meeting requirements for 65nm following satisfactory...

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