Applied Materials etch system helps scaling 70nm DRAM production

Press release, April 3; Esther Lam, DIGITIMES Asia Wednesday 4 April 2007 0

Applied Materials announced that it has made a significant leap forward in deep trench etch nanomanufacturing technology with its new Applied Centura Mariana Trench etch system. Mariana is the first system that can etch 80:1 aspect ratio trenches –...

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