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Cymer installs 60-90W light source at Nikon

Press release; Jessie Shen, DIGITIMES Asia Thursday 23 July 2009 0

Cymer's XLR 600ix light source has been integrated into a scanner at Nikon, and successfully installed at the Asia-based chipmaker. The 60-90 watt (60-90W) immersion light source will allow chipmakers to meet high throughput requirements for double...

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