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TSMC acquires MEMS MVD equipment

Hans Wu, Taipei; Meiling Chen, DIGITIMES Asia Tuesday 20 October 2009 0

Taiwan Semiconductor Manufacturing Company (TSMC) has procured molecular vapor deposition (MVD) equipment developed by US-based Applied MicroStructures (AMST) in order to meet the yield rate of MEMS manufacturing required by Analog Device (ADI), according...

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