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TSMC to take delivery of ASML EUV lithography system

Press release, February 22; Rodney Chan, DIGITIMES Asia Monday 22 February 2010 0

ASML Holding today announced that Taiwan Semiconductor Manufacturing Company (TSMC) will take delivery of a Twinscan NXE:3100 extreme ultra-violet (EUV) lithography system. This tool represents one of six NXE:3100 EUV systems for ASML's worldwide partners...

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