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EUV to get ready for high-volume production in 2014, says IMEC chief

Nancy Cheng, Taipei Oct 21, 2010, 14:04 0

Extreme ultraviolet (EUV) lithography is likely to reach mass production in 2014 at the earliest, according to Luc Van den hove, president and CEO of Belgian researcher IMEC. But he does not expect the commercialization of maskless lithography to take...

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