ASML updates EUV progress

Patty Wang, Munich; Jessie Shen, DIGITIMES Asia Friday 2 March 2012 0

ASML has been developing the next generation of its NXE-series EUV lithography machines, the 3300 series, according to Peter Jenkins, VP of marketing at the Dutch fab tool supplier. The available NXE:3100 EUV lithography tools have been shipped to customers...

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