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Experts disagree on cost and efficiency of High-NA EUV

Amanda Liang, Taipei; Jingyue Hsiao, DIGITIMES Asia 0

Credit: ASML

At a recent meeting held in San Jose, California, experts expressed a diverging view on the future of EUV. Some believe that EUV, coupled with double patterning and advanced packaging, could be more promising than High-NA EUV machines.

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