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Lam Research intros breakthrough deposition technique to enable next-gen MEMS for 5G and beyond

Jessie Shen, DIGITIMES Asia, Taipei 0

Credit: Lam Research

Lam Research has announced what it claims is the world's first production-oriented Pulsed Laser Deposition (PLD) technique for next-generation MEMS microphones and Radio Frequency (RF) filters.

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