Lam Research has announced what it claims is the world's first production-oriented Pulsed Laser Deposition (PLD) technique for next-generation MEMS microphones and Radio Frequency (RF) filters.
The article requires paid subscription. Subscribe Now
Credit: Lam Research
Lam Research has announced what it claims is the world's first production-oriented Pulsed Laser Deposition (PLD) technique for next-generation MEMS microphones and Radio Frequency (RF) filters.
