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Spirox TGV inspection capable of scanning entire substrate in 20 minutes

, Hsinchu
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Spirox CEO Paul Yang (L) and chairman Peter Chin. Credit: DIGITIMES

As advanced packaging moves toward higher-density stacking, demand is rising for glass through-glass via (TGV) and through-silicon via (TSV) inspection, while glass core substrates are steadily shifting from technology validation to mass production...

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