Taiwan Semiconductor Manufacturing Company (TSMC) has announced a total of 20 purchases of machinery equipment, worth NT$17.72 billion (US$537 million), since July 13.

Cymer, which specializes in excimer laser illumination sources for deep ultraviolet (DUV) photolithography systems, has kicked off shipments of what it claims is the world's first...

Taiwan Semiconductor Manufacturing Company (TSMC) has announced the purchase of new machinery equipment from ASML Hong Kong and Tokyo Electron. Total transaction amount was around...

High-priced equipment enabled the semiconductor lithography sector to grow to 25% of entire front-end equipment processing market in 2008, according to market research firm The Information...

Shipments of semiconductor equipment supplier ASM Lithography's (ASML's) extreme ultraviolet (EUV) systems for 22nm and sub-22nm process nodes are expected to kick off by 2010, according...