ACM Research finding strength in megasonic cleaning tool: Q&A with CEO David Wang

Claire Sung, Taipei; Jessie Shen, DIGITIMES Asia Thursday 11 June 2009 0

ACM Research has developed a 300mm single-wafer megasonic cleaning tool, which has been adopted by several leading foundry houses, according to company founder and CEO David Wang. Its megasonic technology, dubbed space-alternated phase shift (SAPS),...

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