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IMEC sets major step towards 3D integration of DRAM on logic

Press release
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Leuven, Belgium - September 30, 2009 - IMEC and its 3D integration partners have taped-out Etna, a new 3D chip integrating a commercial DRAM chip on top of a logic IC. The new 3D stack resembles as close as possible to future commercial chips. It consists of...

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