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JSR sets up EUV photoresist plant in South Korea to meet semiconductor demand

Jessica Tsai, Taipei; Levi Li, DIGITIMES Asia 0

Credit: AFP

Japanese photoresist leader JSR is building a production base in South Korea to manufacture metal-oxide resists (MOR), a critical material for extreme ultraviolet (EUV) lithography. Slated to begin mass production in 2026, this initiative aims to bolster the stability of South Korea's semiconductor supply chain.

South Korean media, including ETNews and Maeil Business Newspaper, report that the Ministry of Trade, Industry, and Energy (MOTIE) participated in the groundbreaking ceremony for JSR's MOR plant. MOTIE is committed to providing policy support to expedite operations and encourage further investments.

JSR, which first set up a factory in Ochang, North Chungcheong Province, in 2003, has continuously expanded its presence in South Korea. This latest project will house the world's first production facility for semiconductor-grade EUV MOR.

South Korea still relies heavily on Japanese imports for photoresists, essential for semiconductor and display manufacturing. However, domestic production initiatives have steadily reduced import volumes in recent years.

Industry analysts predict JSR's new production base will significantly increase South Korea's share of domestically sourced photoresists.

MOTIE expects mass production of MOR to strengthen South Korea's semiconductor sector by ensuring timely responses to local corporate demands.

Japan's 2019 export restrictions on key photoresist materials created a supply chain crisis in South Korea. This sparked a push for domestic production, drawing numerous semiconductor material suppliers to the region.

EUV MOR is now set to replace chemically amplified photoresists in semiconductor processes, positioning itself as a pivotal material for driving industry competitiveness.

Dae-ja Kim, head of MOTIE's Trade and Investment Office, attended the November 12 groundbreaking ceremony. According to Maeil Business Newspaper, the event is viewed as a signal that Japan's export restrictions have effectively been lifted.

"We aim to support JSR's investment success and foster additional projects with Chungbuk Province and Cheongju City," Kim stated during the ceremony. "Our policies will focus on positioning South Korea as a global hub for high-tech industries."

Data from the Korea Customs Service (KCS) reveals a steady decline in South Korea's imports of semiconductor photoresists from Japan over the past five years. Imports fell from 992.6 tons in 2020 to 668.7 tons in 2023 and 539.4 tons between January and October 2024. Despite this drop, Japan still supplied about 95% of South Korea’s photoresists in 2024.

JSR aims to finalize construction and start mass production of EUV MOR by 2026.

The initiative is expected to address South Korean companies' needs and boost the competitiveness of the nation’s semiconductor sector.

Locating the production facility near semiconductor plants will enable JSR to respond swiftly to customer demands and enhance product performance through continuous R&D.