KLA-Tencor unveils Puma 91xx darkfield inspection system

Press release, September 13; Rodney Chan, DIGITIMES Asia Wednesday 13 September 2006 0

KLA-Tencor on September 11 unveiled the Puma 91xx darkfield patterned wafer inspection system, the latest member of its Puma product family. The company said the Puma 91xx series provides nearly double the throughput of the previous-generation Puma...

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