Puma 9000 combines high-res imaging with darkfield scattering; KLA-Tencor offers the best of both worlds

Chris Hall, DigiTimes.com, Taipei Friday 16 September 2005 0

Announced in June, KLA-Tencor’s Puma 9000 patterned wafer inspection system combines high-resolution imaging with laser scattering technology. Previously, KLA-Tencor offered these technologies on different platforms. The product portfolio had...

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