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TSMC and UMC to purchase new 193nm wafer scanners in 3Q

Samson Yu, Taipei; Tsering Namgyal, DIGITIMES Asia Monday 16 June 2003 0

Taiwan Semiconductor Manufacturing Company (TSMC) and United Microelectronics Corporation (UMC) will purchase next-generation 193nm wafer scanners in the third quarter to prepare for migration to 90nm processing, sources said.

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