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Hermes Microvision lands e-beam equipment order from SMIC

Staff reporter, Shanghai; Jessie Shen, DIGITIMES Asia Monday 23 March 2009 0

Semiconductor Manufacturing International Corporation (SMIC) has placed orders for three e-beam inspection systems for 45nm and below production with Hermes Microvision (HMI), a subsidiary of Taiwan-based semiconductor equipment provider Hermes Epitek,...

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