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ASML to ship 10 EUV tools in 2012

Josephine Lien, Taipei; Jessie Shen, DIGITIMES Asia Monday 16 May 2011 0

ASML has received 10 orders for its next-generation ultraviolet (EUV) lithography system – the NXE:3300 – with deliveries starting in 2012, according to the Dutch fab tool provider.

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