First high-NA EUV to arrive early for TSMC

Monica Chen, Hsinchu; Jessie Shen, DIGITIMES Asia Tuesday 10 September 2024 0

Credit: AFP

According to industry sources, TSMC plans to launch its first high-NA EUV lithography equipment at its fab site in Hsinchu, northern Taiwan, by the end of September, a quarter earlier than previously expected.

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